Brush, method of forming a brush, and structure embodied in a machine readable medium used in a design process

ABSTRACT

Embodiments described herein generally relate to a brush, a method of forming a brush, and a structure embodied in a machine readable medium used in a design process are provided. The brush includes a body and a channel configured to deliver a cleaning liquid through holes in the body. The method forms the brush using 3D printing. The structure provides details for making the brush. The disclosure herein allows a method of forming a brush that does not require the removal of active porogen.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.16/811,935, filed Mar. 6, 2020, which is herein incorporated byreference.

BACKGROUND Field

Embodiments of the present disclosure generally relate to an article ofmanufacture and a method and, more specifically, to a brush, a method offorming a brush, and a structure embodied in a machine readable mediumused in a design process.

Description of the Related Art

Chemical mechanical polishing (CMP) is commonly used in themanufacturing of high-density integrated circuits to planarize or polisha layer of material deposited on a substrate. A typical CMP processincludes contacting the material layer to be planarized with a polishingpad and moving the polishing pad, the substrate, or both, and hencecreating relative movement between the material layer surface and thepolishing pad, in the presence of a polishing fluid comprising abrasiveparticles.

Various residue and particles can be left behind after the CMP processwhich often are removed by a post-CMP clean. Post-CMP cleaning equipmentcan include brushes that are configured to dispense cleaning liquid ontoa surface of the substrate. The brushes are urged, or pressed, againstthe substrate surface to remove residue and particles. Cleaning liquidsdispersed from holes, or pores, in the brush increase the cleaningcapabilities of the post-CMP cleaning brush.

Often, brushes used in the above-described post-CMP cleaning processesare selected based on the material properties of the brush material andthe suitability of those material properties for the desired post-CMPcleaning application. Brushes are typically made of microporouspolyvinyl alcohol/acetate (PVA). One example of a material property thatcan be adjusted to tune the performance of a brush is the porosity of apolymer material used to form the brush. Properties related to thepolymer material include pore size, pore structure, and material surfaceasperities.

One drawback in the art is that conventional methods of introducingporosity into the brush material typically comprise blending apre-polymer composition with a porogen, or porosity-forming agent (suchas a water soluble material). However, the porosity-forming agent mustbe removed after curing of the brush. The casting and subsequent porogenremoval is a cumbersome and lengthy process. In addition, it isdifficult to develop and create new designs without major changes to themanufacturing process. Also, post-processing of the brush can be neededin order to standardize feature sizes (i.e., height of brushing nodulesor nodes).

Therefore, there is a need in the art for manufacturing brushes withbetter control of material properties.

SUMMARY

Embodiments described herein generally relate to a brush, a method ofmaking a brush, and a structure used in in a design process to form abrush. The brushes disclosed herein have greater control of materialproperties, such as porosity, hole size, and hole variation. Thesematerial properties allow for more effective post-CMP cleaning.

In one embodiment, a brush is provided. The brush includes a body and achannel disposed in the body. The body includes a first polymer materialthat includes a plurality of body holes. The plurality of body holes hasa first body region. A first body porosity of the first body region isgreater than about 70%. The channel is fluidly coupled to the pluralityof body holes.

In another embodiment, a structure embodied in a machine readable mediumused in a design process is provided. The structure includes a brush.The brush includes a body and a channel disposed in the body. The bodyincludes a first polymer material that includes a plurality of bodyholes. The plurality of body holes has a first body region. A first bodyporosity of the first body region is greater than about 70%. The channelis fluidly coupled to the body plurality of holes.

In yet another embodiment, a method of forming a brush is provided. Themethod includes forming a body of the brush using a three-dimensional(3D) printing process, and forming a channel in the body of the brushusing a 3D printing process. The body includes a first polymer materialcomprising a plurality of body holes. The plurality of body holes has afirst body region. A first body porosity of the first body region isgreater than about 70%. The channel is fluidly coupled to the bodyplurality of holes.

In still another embodiment, a non-transient computer readable medium(CRM) is provided. The CRM contains program instructions for causing asystem to perform a method of forming a brush. The method includesforming a body of the brush using a three-dimensional (3D) printingprocess, and forming a channel in the body of the brush using a 3Dprinting process. The body includes a first polymer material comprisinga plurality of body holes. The plurality of body holes has a first bodyregion. A first body porosity of the first body region is greater thanabout 70%. The channel is fluidly coupled to the body plurality ofholes.

In another embodiment, an additive manufacturing system is provided. Theadditive manufacturing system includes a motion system, a tank system, atreatment source, and a controller. The motion system includes a supportmember and a support actuator. The motion system is disposed above thetank system. The tank system is disposed above the treatment source. Thetank system includes a tank configured to contain a printing liquid. Thetreatment source is configured to emit a treatment emission onto asurface of the printing liquid. The controller is configured to controlthe support actuator. The support actuator is configured to raise thesupport member with respect to the tank system.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above-recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this disclosure and are therefore not to beconsidered limiting of its scope, for the disclosure may admit to otherequally effective embodiments.

FIG. 1A illustrates a schematic side view of a cleaning system,according to one embodiment.

FIG. 1B illustrates a schematic top view of a cleaning system, accordingto one embodiment.

FIG. 2 illustrates a zoomed-in portion of a brush, according to oneembodiment.

FIG. 3A illustrates a schematic sectional view of an additivemanufacturing system, according to one embodiment.

FIG. 3B illustrates a schematic cross-sectional view of a dropletdisposed on a surface, according to one embodiment.

FIG. 4 illustrates a portion of computer-aided design (CAD) compatibleprint instructions, according to one embodiment.

FIG. 5 is a flow diagram for method operations of forming a brush,according to one embodiment.

FIGS. 6A and 6B illustrate schematic sectional views of an additivemanufacturing system, according to one embodiment.

FIG. 7 is a flow diagram for method operations of forming a brush,according to one embodiment.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements and features of oneimplementation may be beneficially incorporated in other implementationswithout further recitation.

DETAILED DESCRIPTION

Embodiments described herein generally relate to a brush, a method offorming a brush, and a structure embodied in a machine readable medium.The brush includes a body and a channel configured to deliver a cleaningliquid through holes in the body. The method forms the brush using 3Dprinting. The structure provides details for making the brush. Thebrushes are rotated in order to clean the surface of a substrate. Themethod does not require the removal of active porogen used inconventional brush-making methods. This improves the speed and ease ofmanufacture of the brush. In addition, new designs can be used with thesame manufacturing process by varying the details of the structure and3D printing method. Embodiments of the disclosure can be useful for, butare not limited to, brushes and manufacture of brushes for post-CMPcleaning processes.

As used herein, the term “about” refers to a +/−10% variation from thenominal value. It is to be understood that such a variation can beincluded in any value provided herein.

The brushes feature pores that are selectively arranged across abrushing surface (i.e., a surface of the body of the brush and/or thebrushing elements if present). As used herein, the term “pore” includesopenings defined in the brushing surface, voids formed in the materialbelow the brushing surface, pore-forming features disposed in thebrushing surface, and pore-forming features disposed in the brushingmaterial below the brushing surface. Pore-forming features typicallycomprise a water-soluble-sacrificial material that dissolves uponexposure to a fluid, thus forming a corresponding opening in thebrushing surface and/or void in the brushing material below the brushingsurface. In some embodiments, the water-soluble-sacrificial materialswells upon exposure to a fluid, thus deforming the surrounding brushingmaterial to provide asperities at the brushing surface. The resultingpores and asperities desirably facilitate transporting liquid to theinterface between the brushing surface and a to-be-brushed materialsurface of a substrate.

The term “selectively arranged pores” as used herein refers to thedistribution of pores within the brushing surface. Herein, the pores aredistributed in one or both directions of an X-Y plane parallel to thebrushing surface (i.e., laterally) and in a Z-direction which isorthogonal to the X-Y planes (i.e., vertically).

FIG. 1A illustrates a schematic side view of a cleaning system 100,according to one embodiment. FIG. 1B illustrates a schematic top view ofthe cleaning system 100, according to one embodiment. The cleaningsystem 100 is configured to clean a substrate 101 (e.g., after achemical mechanical polishing (CMP) process). As shown, the cleaningsystem 100 includes a plurality of rollers 110, one or more brushes 102,one or more fluid sources 130, one or more fluid inputs 131, and one ormore brush actuators 105.

The one or more brushes 102 are configured to clean and/or removedebris, residue, or other contaminants from a surface of the substrate101. For example, the debris can include leftover polishing pad debris,slurry particles and other polish byproducts. As shown, the brush 102includes a body 109, a channel 104 disposed in the body, and a pluralityof brushing elements 103. FIGS. 1A and 1B illustrate a cleaning system100 including two brushes 102, with one of the brushes cleaning a topsurface 101A of the substrate 101, and another brush cleaning a bottomsurface 101B of the substrate. However, any number of brushes 102 can beincluded, with any number of brushes on either surface of the substrate101. In addition, although a circular substrate 101 is illustrated inFIGS. 1A and 1B, any shape of substrate can benefit from the cleaningsystem 100 disclosed herein. The length and radius of the brushes 102vary with the size of the substrate to be cleaned. The brushes 102 havea brushing surface, defined as a portion of the brush that touches thesurface of the substrate 101. The brushing surface can include anyportion of the body 109 that touches the surface of the substrate 101.The brushing surface can include any portion of the brushing elements103 (if present) that touches the surface of the substrate 101.

Although the brush 102 is shown in FIGS. 1A and 1B as having a generallycylindrical shape, other brush shapes are contemplated. For example, thebrush 102 can have a wedge shape, such that a radius r of the brush islarger at a first end of the brush 102A than at a second end 102B of thebrush. In another example, the brush 102 has an hourglass shape, suchthat the radius r of is smaller at the center 102C of the brush than ateither the first end 102A or the second end 102B of the brush.

The one or more brush actuators 105 are configured to rotate the one ormore brushes 102. The one or more brushes 102 can be connected to asingle brush actuator 105, or the one or more brushes can be connectedto any number of brush actuators 105. The brush actuators 105 rotate thebrushes 102, such that the brush 102 is pressed or urged against thesurface 101A, 101B of the substrate 101. The brushes 102 can rotate ineither a clockwise or counterclockwise direction. The brushes 102 canrotate in the same direction, or in different directions from whatanother. The brushes 102 can be mounted via the channel 104.

The plurality of rollers 110 rotate the substrate 101 during cleaning,increasing the removal of debris and residue from the surfaces 101A,101B of the substrate. One or more roller actuators 120 are configuredto rotate the plurality of rollers 110. The plurality of rollers 110 canrotate the substrate 101 in either a clockwise or counterclockwisedirection.

The channel 104 of the brush 102 is fluidly connected to the fluid input131. The fluid input 131 is fluidly connected to a fluid source 130. Thefluid source 130 is configured to deliver a cleaning liquid 115 to thebrush 102, and thus to the surface of the substrate 101 through thebrushing elements 103 and/or body 109. In other embodiments, the fluidsource 130 is configured to deliver the cleaning liquid 115 directly toa surface of the substrate 101 via a nozzle (not shown) not attached tothe brush 102. In other embodiments, the brush 102 does not includebrushing elements, and the cleaning liquid 115 is delivered by poresholes in the body 109.

For effective cleaning, it is desired that the brushing surface isapproximately coplanar to the substrate surface 101A, 101B. In someembodiments, the brush 102 includes a plurality of brushing elements103. The brushing elements 103 include any element that can used in theart that can make effective contact with the substrate surface 101A,101B such that the brushing surface is substantially in the same planeas the substrate surface. The brushing elements 103 can include anyfeature used in the art to clean a surface, such as, but not limited to,nodules, nodes, brushes, or wipers. The brushing elements 103 can be ofconventional size, such as about 1 mm dimensions, or microscopic, suchas about 1 μm dimensions. As disclosed herein, the dimension of thebrushing element 103 can be a radius, diameter, and/or height of thebrushing element. Although the brushing elements 103 are arranged in arectangular grid as shown in FIGS. 1A and 1B, the brushing elements canform any desired pattern. In some embodiments, the brushing elements 103have a star-shape, which allow the brushing elements to remove moredebris present on the substrate 101.

The brushing elements 103 include nodules with dimensions from about 10μm to about 1 mm, such as from about 50 μm to about 250 μm, according toone embodiment. The brushing elements 103 include wipers with dimensionsfrom about 50 μm to about 500 μm, according to one embodiment. Wiperlike features have rectangular shape and are expected to be mosteffective in the 100-500 um length with 50-100 um width. All featuresare nominally 50-100 um high, though could also be as small as 20 and ashigh as 200 um.

The brushing elements 103 are pressed or urged against the surface 101A,101B of the substrate 101 during cleaning. In some embodiments, thebrushing elements 103 are configured to eject the cleaning liquid 115onto a surface of the substrate 101. The brushing elements 103 includeholes and/or pores configured to deliver the cleaning liquid 115. Thecombination of the urging of the brushing elements 103 and deliveringthe cleaning liquid 115 assists in removing debris and othercontaminants from the surface of the substrate 101. The cleaning liquid115 can include any liquid used in the art for cleaning of a substrate,such as a high pH solution.

FIG. 2 illustrates a zoomed-in portion of the brush 102, according toone embodiment. The body 109 include a first polymer material. As shown,the body 109 includes a plurality of body holes (alternatively referredto as body pores) 210 having a first body region 211. The body holes 210are configured to have different shapes and sizes, such as, but notlimited to, circular, polygonal, or irregular shapes. The body holes 210holes have a dimension from about 10 μm to about 100 μm. The body holes210 are fluidly connected to the channel 104. The body holes 210 areinterconnected with one another, such that the body holes are configuredto deliver a cleaning solution therethrough. The cleaning solution flowsthrough the channel 104, and the body holes 210, such that the cleaningsolution (e.g., the cleaning liquid 115 of FIGS. 1A and 1B) is deliveredto a surface of a substrate (e.g., the surfaces 101A, 101B of thesubstrate 101 of FIGS. 1A and 1B). As used herein, “porosity” refers tothe volume of void-space as a percentage of the total bulk volume in agiven sample. The porosity of the first body region 211 is greater thanabout 70%. The high porosity of the first body region 211 allows for anefficient ejection of cleaning liquid (e.g., the cleaning liquid 115 ofFIGS. 1A and 1B) through the large volume of the holes in the first bodyregion.

The plurality of body holes 210 has a second body region 213, and asecond body porosity of the second body region is greater than the firstbody porosity, according to one embodiment. The plurality of body holes210 has a third body region 212, a third body porosity of the third bodyregion is greater than the first body porosity, and the third bodyporosity is less than the second body porosity, according to oneembodiment. The plurality of body holes 210 can have a size gradientbetween regions. Said another way, the size of the body holes 210 canvary linearly or in any other fashion in different portions of the body109. The body hole 210 size can vary along the surface of the body 109(i.e., the X-Y plane) or through the depth of the body (i.e., the Zdirection). In some embodiments, the body holes 210 are larger close tothe channel 104 and the body holes become smaller at a surface of thebody 102. This allows for a larger volume of cleaning liquid to bepassed from the channel 104 to the substrate through the body holes 210,thus improving the cleaning of the substrate.

The brush 102 includes the plurality of brushing elements 103, accordingto some embodiments. The brushing element 103 includes a second polymermaterial. The first polymer material of the body 109 is different fromthe second polymer material of the brushing elements 103, according toone embodiment. The first polymer material of the body 109 is the sameas the second polymer material of the brushing elements 103, accordingto one embodiment.

As shown, the brushing element 103 includes a plurality of element holes(alternatively referred to as element pores) 220 having a first elementregion 221. The element holes 220 are configured to have differentshapes and sizes, such as, but not limited to, circular, polygonal, orirregular shapes. The element holes 220 are fluidly connected to thechannel 104. The element holes 220 are interconnected, such that theelement holes are configured to deliver a cleaning solutiontherethrough. The cleaning solution flows through the channel 104, andthe element holes 220, such that the cleaning solution (e.g., thecleaning liquid 115 of FIGS. 1A and 1B) is delivered to a surface of asubstrate (e.g., the surfaces 101A, 101B of the substrate 101 of FIGS.1A and 1B). The porosity of the first element region 221 is greater thanabout 70%. The high porosity of the first element region 221 allows foran efficient ejection of cleaning liquid (e.g., the cleaning liquid 115of FIGS. 1A and 1B) through the large volume of the holes in the firstelement region.

The plurality of element holes 220 has a second element region 223, anda second body porosity of the second element region is greater than theelement body porosity, according to one embodiment. The plurality ofelement holes 220 has a third element region 222, a third elementporosity of the third element region is greater than the first elementporosity, and the third element porosity is less than the second elementporosity, according to one embodiment. The first element porosity isgreater than the first body porosity, according to one embodiment.

The plurality of element holes 220 can have a size gradient betweenregions. Said another way, the size of the holes 220 can vary linearlyor in any other fashion in different portions of the brushing element103. The hole 220 size can vary along the surface of the brushingelement 103 (i.e., the X-Y plane) or through the depth of the brushingelement (i.e., the Z direction). In some embodiments, the element holes220 are larger close to the channel 104 and the element holes becomesmaller at a surface of the brushing element 103. This allows for alarger volume of cleaning liquid to be passed from the channel 104 tothe substrate through the element holes 220, thus improving the cleaningof the substrate.

Typically, the holes disclosed herein have (X-Y) dimensions which areabout 500 μm or less, such as about 400 μm or less, about 300 μm orless, about 200 μm or less, or about 150 μm or less. In someembodiments, the holes will have at least one lateral dimension that isabout 5 μm or more, about 10 μm or more, about 25 μm or more, or about50 μm or more. In some embodiments, the holes will have at least onelateral dimension in the range of about 50 μm to about 250 μm, such asin the range of about 50 μm to about 200 μm, about 50 μm to about 150μm. The holes are spaced apart by about 5 μm or more, such as about 10μm or more, 20 μm or more, 30 μm or more, 40 μm or more, or 50 μm ormore.

FIG. 3A illustrates a schematic sectional view of an additivemanufacturing system 300, according to one embodiment. The additivemanufacturing system 300 is configured to print component 303 (e.g., thebrush 102) using a three-dimensional (3D) printing process. As shown,the additive manufacturing system 300 includes a movable manufacturingsupport 302, a plurality of dispense heads 304, 305, 306, 307 disposedabove the manufacturing support 302, a treatment source 308, and asystem controller 310. The dispense heads 304, 305, 306, 307 can moveindependently of one another and independently of the manufacturingsupport 302 during the polishing pad manufacturing process. The firstand second dispense heads 304 and 306 are respectively fluidly coupledto a first pre-polymer composition source 312 and a first sacrificialmaterial source 314 which are used to form the body 109 including thefirst polymer material and the plurality of body holes 210 described inFIG. 2 above. The third and fourth dispense heads 305 and 307 arerespectively fluidly coupled to a second pre-polymer composition source313 and second sacrificial material source 315 which are used to formthe brushing elements 103 including the second polymer material and theplurality of element holes 220 described in FIG. 2 above.

In some embodiments, the additive manufacturing system 300 includes asmany dispense heads as desired to each dispense a different pre-polymercomposition or sacrificial material precursor composition. In someembodiments, the additive manufacturing system 300 further comprisespluralities of dispense heads where two or more dispense heads areconfigured to dispense the same pre-polymer compositions or sacrificialmaterial precursor compositions.

Here, each of dispense heads 304, 305, 306, 307 features an array ofdroplet ejecting nozzles 316 configured to eject droplets 330, 331, 332,333 of the first pre-polymer composition 312, the first sacrificialmaterial composition 314, the second pre-polymer composition 313, andthe second sacrificial material composition 315, respectively, deliveredto the dispense head reservoirs. Here, the droplets 330, 331, 332, 333are ejected towards the manufacturing support 302 and thus onto themanufacturing support 302 or onto a previously formed print layer 318disposed on the manufacturing support 302. Typically, each of thedispense heads 304, 305, 306, 307 is configured to fire (e.g., controlthe ejection of) droplets 330, 331, 332, 333 from each of the nozzles316 in a respective geometric array or pattern independently of thefiring other nozzles 316 thereof. Herein, the nozzles 316 areindependently fired according to a droplet dispense pattern for a printlayer to be formed as the dispense heads 304, 305, 306, 307 moverelative to the manufacturing support 302. Once dispensed, the dropletsof the first and/or second pre-polymer composition and/or the dropletsof the first and/or second sacrificial material composition are at leastpartially treated. The treatment can include exposure to electromagneticradiation (e.g., ultraviolet (UV) radiation) provided by anelectromagnetic radiation source, such as a treatment source 308including a UV light source, to form a print layer.

In some embodiments, dispensed droplets of the pre-polymer compositions,such as the dispensed droplets 330 of the first pre-polymer composition,are exposed to electromagnetic radiation to physically fix the dropletbefore it spreads to an equilibrium size as shown in FIG. 3B. Typically,the dispensed droplets are exposed to electromagnetic radiation to atleast partially cure the pre-polymer compositions thereof within 1second or less of the droplet contacting a surface, such as the surfaceof the manufacturing support 302 or of a previously formed print layer318 disposed on the manufacturing support 302.

FIG. 3B illustrates a schematic cross-sectional view of a droplet 330 adisposed on a surface 318 a, according to one embodiment. In a typicallyadditive manufacturing process, a droplet of pre-polymer composition,such as the droplet 330 a, will spread and reach an equilibrium contactangle α with the surface 318 a of a previously formed layer within aboutone second from the moment in time that the droplet 330 a contacts thesurface 318 a. The equilibrium contact angle α is a function of at leastthe material properties of the pre-polymer composition and the energy atthe surface 318 a (e.g., the surface energy) of the previously formedlayer (e.g., previously formed layer 318). In some embodiments, it isdesirable to at least partially cure the dispensed droplet before itreaches an equilibrium size, in order to fix the contact angle of thedroplet with the surface 318 a of the previously formed layer. In thoseembodiments, the fixed droplet's 330 b contact angle θ is greater thanthe equilibrium contact angle α of the droplet 330 a of the samepre-polymer composition which was allowed to spread to its equilibriumsize.

Herein, at least partially curing a dispensed droplet causes the atleast partial polymerization (e.g., cross-linking) of the pre-polymercomposition(s) within the droplets and with adjacently disposed dropletsof the same or different pre-polymer composition to form a continuouspolymer phase. In some embodiments, the pre-polymer compositions aredispensed and at least partially cured to form a well about a desiredpore before a sacrificial material composition is dispensed thereinto.

The pre-polymer compositions used to form the first polymer material ofthe body 109 and the second polymer material of the brushing elements103 described above each comprise a mixture of one or more of functionalpolymers, functional oligomers, functional monomers, reactive diluents,and photoinitiators. The pre-polymer compositions for the first polymermaterial and the second polymer material are the same or different,according to one embodiment. The first polymer material and the secondpolymer material are the same or different, according to one embodiment.

Examples of suitable functional polymers which may be used to form oneor both of the at least two pre-polymer compositions includemultifunctional acrylates including di, tri, tetra, and higherfunctionality acrylates, such as1,3,5-triacryloylhexahydro-1,3,5-triazine or trimethylolpropanetriacrylate.

Examples of suitable functional oligomers which may be used to form oneor both of the at least two pre-polymer compositions includemonofunctional and multifunctional oligomers, acrylate oligomers, suchas aliphatic urethane acrylate oligomers, aliphatic hexafunctionalurethane acrylate oligomers, diacrylate, aliphatic hexafunctionalacrylate oligomers, multifunctional urethane acrylate oligomers,aliphatic urethane diacrylate oligomers, aliphatic urethane acrylateoligomers, aliphatic polyester urethane diacrylate blends with aliphaticdiacrylate oligomers, or combinations thereof, for example bisphenol-Aethoxylate diacrylate or polybutadiene diacrylate, tetrafunctionalacrylated polyester oligomers, and aliphatic polyester based urethanediacrylate oligomers.

Examples of suitable monomers which may be used to from one or both ofthe at least two pre-polymer compositions include both mono-functionalmonomers and multifunctional monomers. Suitable mono-functional monomersinclude tetrahydrofurfuryl acrylate (e.g. SR285 from Sartomer®),tetrahydrofurfuryl methacrylate, vinyl caprolactam, isobornyl acrylate,isobornyl methacrylate, 2-phenoxyethyl acrylate, 2-phenoxyethylmethacrylate, 2-(2-ethoxyethoxy)ethyl acrylate, isooctyl acrylate,isodecyl acrylate, isodecyl methacrylate, lauryl acrylate, laurylmethacrylate, stearyl acrylate, stearyl methacrylate, cyclictrimethylolpropane formal acrylate, 2-[[(Butylamino) carbonyl]oxy]ethylacrylate (e.g. Genomer 1122 from RAHN USA Corporation),3,3,5-trimethylcyclohexane acrylate, or mono-functional methoxylated PEG(350) acrylate. Suitable multifunctional monomers include diacrylates ordimethacrylates of diols and polyether diols, such as propoxylatedneopentyl glycol diacrylate, 1,6-hexanediol diacrylate, 1,6-hexanedioldimethacrylate, 1,3-butylene glycol diacrylate, 1,3-butylene glycoldimethacrylate 1,4-butanediol diacrylate, 1,4-butanediol dimethacrylate,alkoxylated aliphatic diacrylate (e.g., SR9209A from Sartomer®),diethylene glycol diacrylate, diethylene glycol dimethacrylate,dipropylene glycol diacrylate, tripropylene glycol diacrylate,triethylene glycol dimethacrylate, alkoxylated hexanediol diacrylates,or combinations thereof, for example SR562, SR563, SR564 from Sartomer®.

Typically, the reactive diluents used to form one or more of thepre-polymer compositions are least monofunctional, and undergopolymerization when exposed to free radicals, Lewis acids, and/orelectromagnetic radiation. Examples of suitable reactive diluentsinclude monoacrylate, 2-ethylhexyl acrylate, octyldecyl acrylate, cyclictrimethylolpropane formal acrylate, caprolactone acrylate, isobornylacrylate (IBOA), or alkoxylated lauryl methacrylate.

Examples of suitable photoinitiators used to form one or more of the atleast two different pre-polymer compositions include polymericphotoinitiators and/or oligomer photoinitiators, such as benzoin ethers,benzyl ketals, acetyl phenones, alkyl phenones, phosphine oxides,benzophenone compounds and thioxanthone compounds that include an aminesynergist, or combinations thereof.

Examples of first and/or second polymer materials formed by thepre-polymer compositions described above typically include at least oneof oligomeric and, or, polymeric segments, compounds, or materialsselected from the group consisting of: polyamides, polycarbonates,polyesters, polyether ketones, polyethers, polyoxymethylenes, polyethersulfone, polyetherimides, polyimides, polyolefins, polysiloxanes,polysulfones, polyphenylenes, polyphenylene sulfides, polyurethanes,polystyrene, polyacrylonitriles, polyacrylates, polymethylmethacrylates,polyurethane acrylates, polyester acrylates, polyether acrylates, epoxyacrylates, polycarbonates, polyesters, melamines, polysulfones,polyvinyl materials, acrylonitrile butadiene styrene (ABS), halogenatedpolymers, block copolymers, and random copolymers thereof, andcombinations thereof.

In one embodiment, first and second polymer materials include moleculeswith a soft core and acrylate functional groups. UV curing thesefunctional groups results in polymerization of the molecules, thusforming the first and/or second polymer materials. For example, a UVcurable formation of molecules, when exposed to UV light, forms a softhydrophilic matrix to match wet PVA. Examples of the soft core include,but are not limited to, silicone, PVA, urethane, aliphatic urethane,acetate, epoxide, and combinations thereof.

The sacrificial material composition(s) used to form the plurality ofbody holes 210 and/or the plurality of element holes 220 describedabove, include water-soluble material, such as, glycols (e.g.,polyethylene glycols), glycol-ethers, and amines. Examples of suitablesacrificial material precursors which may be used to form the poreforming features described herein include ethylene glycol, butanediol,dimer diol, propylene glycol-(1,2) and propylene glycol-(1,3),octane-1,8-diol, neopentyl glycol, cyclohexane dimethanol(1,4-bis-hydroxymethylcyclohexane), 2-methyl-1,3-propane diol,glycerine, trimethylolpropane, hexanediol-(1,6), hexanetriol-(1,2,6)butane triol-(1,2,4), trimethylolethane, pentaerythritol, quinitol,mannitol and sorbitol, methylglycoside, also diethylene glycol,triethylene glycol, tetraethylene glycol, polyethylene glycols,dibutylene glycol, polybutylene glycols, ethylene glycol, ethyleneglycol monobutyl ether (EGMBE), diethylene glycol monoethyl ether,ethanolamine, diethanolamine (DEA), triethanolamine (TEA), andcombinations thereof.

In some embodiments, the sacrificial material precursor comprises awater soluble polymer, such as 1-vinyl-2-pyrrolidone, vinylimidazole,polyethylene glycol diacrylate, acrylic acid, sodium styrenesulfonate,Hitenol BC10®, Maxemul 6106®, hydroxyethyl acrylate and[2-(methacryloyloxy)ethyltrimethylammonium chloride,3-allyloxy-2-hydroxy-1-propanesulfonic acid sodium, sodium4-vinylbenzenesulfonate,[2-(methacryloyloxy)ethyl]dimethyl-(3-sulfopropyl)ammonium hydroxide,2-acrylamido-2-methyl-1-propanesulfonic acid, vinylphosphonic acid,allyltriphenylphosphonium chloride, (vinylbenzyl)trimethylammoniumchloride, allyltriphenylphosphonium chloride,(vinylbenzyl)trimethylammonium chloride, E-SPERSE RS-1618, E-SPERSERS-1596, methoxy polyethylene glycol monoacrylate, methoxy polyethyleneglycol diacrylate, methoxy polyethylene glycol triacrylate, orcombinations thereof.

The system controller 310 is configured to control the variouscomponents of the additive manufacturing system 300. As shown, thesystem controller 310 includes a programmable central processing unit(CPU) 334 which is operable with a memory 335 (e.g., non-volatilememory) and support circuits 336. The support circuits 336 areconventionally coupled to the CPU 434 and comprise cache, clockcircuits, input/output subsystems, power supplies, and the like, andcombinations thereof coupled to the various components of the additivemanufacturing system 300, to facilitate control thereof. The CPU 334 isone of any form of general purpose computer processor used in anindustrial setting, such as a programmable logic controller (PLC), forcontrolling various components and sub-processors of the additivemanufacturing system 300. The memory 335, coupled to the CPU 334, isnon-transitory and is typically one or more of readily availablememories such as random access memory (RAM), read only memory (ROM),floppy disk drive, hard disk, or any other form of digital storage,local or remote.

Typically, the memory 335 is in the form of a computer-readable storagemedia containing instructions (e.g., non-volatile memory), which whenexecuted by the CPU 334, facilitates the operation of the manufacturingsystem 300. The instructions in the memory 335 are in the form of aprogram product such as a program that implements the methods of thepresent disclosure.

The program code may conform to any one of a number of differentprogramming languages. In one example, the disclosure may be implementedas a program product stored on computer-readable storage media for usewith a computer system. The program(s) of the program product definefunctions of the embodiments (including the methods described herein).

Illustrative computer-readable storage media include, but are notlimited to: (i) non-writable storage media (e.g., read-only memorydevices within a computer such as compact disc-read only memory (CD-ROM)disks readable by a CD-ROM drive, flash memory, ROM chips or any type ofsolid-state non-volatile semiconductor memory) on which information ispermanently stored; and (ii) writable storage media (e.g., floppy diskswithin a diskette drive or hard-disk drive or any type of solid-staterandom-access semiconductor memory) on which alterable information isstored. Such computer-readable storage media, when carryingcomputer-readable instructions that direct the functions of the methodsdescribed herein, are embodiments of the present disclosure. In someembodiments, the methods set forth herein, or portions thereof, areperformed by one or more application specific integrated circuits(ASICs), field-programmable gate arrays (FPGAs), or other types ofhardware implementations. In some other embodiments, the polishing padmanufacturing methods set forth herein are performed by a combination ofsoftware routines, ASIC(s), FPGAs and, or, other types of hardwareimplementations.

The system controller 310 directs the motion of the manufacturingsupport 302, the motion of the dispense heads 304, 305, 306, 307, thefiring of the nozzles 316 to eject droplets of pre-polymer compositionstherefrom, and the degree and timing of the treatment of the dispenseddroplets provided by the treatment source 308. In some embodiments, theinstructions used by the system controller to direct the operation ofthe manufacturing system 300 include droplet dispense patterns for eachof the print layers to be formed. In some embodiments, the dropletdispense patterns are collectively stored in the memory 325 asCAD-compatible digital printing instructions. Examples of printinstructions which can be used by the additive manufacturing system 300to manufacture the brushes described herein are shown in FIG. 4 .

In one embodiment, three-dimensional (3D) printing (or 3D printing) isused to produce (or make) brushes (e.g., brushes 102 of FIGS. 1A and 1B)described herein. In one embodiment, a computer (e.g., CAD) model of therequired part is first made and then a slicing algorithm maps theinformation for every layer. A layer starts off with a thin distributionof powder spread over the surface of a powder bed. A chosen bindermaterial then selectively joins particles where the object is to beformed. Then, a piston which supports the powder bed and thepart-in-progress is lowered in order for the next powder layer to beformed. After each layer, the same process is repeated, followed by afinal heat treatment to make the object. Since 3D printing can exerciselocal control over the material composition, microstructure, and surfacetexture, various (and previously inaccessible) geometries may beachieved with this method.

In one embodiment, a brush (e.g., brushes 102 of FIGS. 1A and 1B) asdescribed herein is represented in a data structure readable by acomputer rendering device or a computer display device. Thecomputer-readable medium can contain a data structure that representsthe brush. The data structure can be a computer file, and can containinformation about the structures, materials, textures, physicalproperties, or other characteristics of one or more articles. The datastructure can also contain code, such as computer executable code ordevice control code, that engages selected functionality of a computerrendering device or a computer display device. The structure includes atleast one of test data files, characterization data, verification data,or design specifications, according to one embodiment. The structureresides on a storage medium as a data format used for the exchange oflayout data, according to one embodiment. The data structure can bestored on the computer-readable medium. The computer readable medium caninclude a physical storage medium such as a magnetic memory, floppydisk, or any convenient physical storage medium. The physical storagemedium can be readable by the computer system to render the articlerepresented by the data structure on a computer screen or a physicalrendering device which may be an additive manufacturing device (e.g. theadditive manufacturing devices 300, 600), such as a 3D printer.

FIG. 4 illustrates a portion of CAD compatible print instructions 400,according to one embodiment. The CAD compatible print instructions 400can be used by the additive manufacturing systems 300 and 600 (describedin further detail below) to form embodiments of the brushes 102described herein. Here, the print instructions 400 are for print layersused to form a plurality of hole regions 402 (represented by whiteregions). Although the hole regions 402 are depicted as regular rows ofholes, it is to be understood that any sort of set of holes, along withany hole shape, can be included herein. The plurality of hole regions402 can include either, or both, of the plurality of body holes 210and/or the plurality of element holes 220. Each of the material regions404 (represented by black regions) are formed of a polymer material(e.g. the first and/or second polymer material, and/or the solidmaterial 630 (FIGS. 6A and 6B)). When the additive manufacturing system300 is used, droplets of the pre-polymer composition(s) used to form thefirst and/or second polymer materials are dispensed in the materialregions 404 and droplets of the sacrificial material composition(s) aredispensed within the hole regions 402. Thus, holes are eventuallycreated in the hole regions 402, whereas the material regions 404 remainas the first or second polymer material. The print instructions 400 canbe used to form body regions (e.g., the first, second, and third bodyregions 211, 212, 213) and/or element regions (e.g., the first, second,and third element regions 221, 222, 223).

FIG. 5 is a flow diagram for method 500 operations of forming a brush,according to one embodiment. Although the method 500 operations aredescribed in conjunction with FIGS. 3A and 5 , persons skilled in theart will understand that any system configured to perform the methodoperations, in any order, falls within the scope of the embodimentsdescribed herein. Embodiments of the method 500 may be used incombination with one or more of the systems and system operationsdescribed herein, such as the additive manufacturing system 300 of FIG.3A and the CAD compatible print instructions 400 of FIG. 4 . The method500 can be stored or accessible to the controller 310 as computerreadable media containing instructions, that when executed by aprocessor of the controller 310, cause the additive manufacturing system300 to perform the method 500. Further, embodiments of the method 500can be used to form any one or combination of embodiments of the brushes(e.g., brush 102) shown and described herein.

The method 500 includes a 3D printing process of forming the brush. The3D printing process can include stereolithography (SLA), powder bedprinting, multi-jet printing, fused deposition modeling (FDM), digitallight processing (DLP) printing, continuous liquid interface production(CLIP), and any combination of the above. SLA, DLP, and CLIP methods donot require active porogens to create porosity, reducing the need forlengthy post-cleaning of the brushes. 3D printing allows for tunablecontrol of the brushing surfaces of the brushes. 3D printing allowstunable properties (e.g., hole size, hole density, hole variation)across the length and depth of the brush. 3D printing allows forformation of the body and the brushing elements in a single step.

Method 500 includes forming a body of a component (e.g., brush 102)using a (3D) printing process, the body comprising a first polymermaterial comprising a plurality of body holes, the plurality of bodyholes having a first body region, wherein the a first body porosity ofthe first body region is greater than about 70%, and forming a channelin the body of the brush using a 3D printing process, the channelfluidly coupled to the body plurality of holes. In some embodiments, themethod 500 begins at operation 501, where droplets of a firstpre-polymer composition and droplets of a first sacrificial materialcomposition are dispensed onto a surface. The surface can be, forexample, a previously formed print layer according to a predetermineddroplet dispense pattern.

At operation 502, the dispensed droplets of the first pre-polymercomposition are at least partially treated to form at least portions ofa body of a brush (e.g., the body 109 of the brush 102) having aplurality of holes (e.g., the plurality of body holes 210), the bodyincluding the first polymer material. The plurality of body holes has afirst body region, wherein the first body porosity of the first bodyregion is greater than about 70%. The plurality of body holes has asecond body region, and a second body porosity of the second body regionis greater than the first body porosity, according to one embodiment.The first polymer material has a third body region, a third bodyporosity of the third body region is greater than the first bodyporosity, and the third body porosity is less than the second bodyporosity, according to one embodiment. The high porosity of the bodyholes can be achieved by improved control of material properties of thebody through 3D printing. Operations 501 and 502 are performedsimultaneously, according to one embodiment.

At operation 503, droplets of a second pre-polymer composition anddroplets of a second sacrificial material composition are dispensed ontoa surface. The surface can be, for example, a previously formed printlayer according to a predetermined droplet dispense pattern. The surfacecan also be the finished or partially finished body of the brush.

At operation 504, the dispensed droplets of the second pre-polymercomposition are at least partially treated to form at least portions ofa plurality of brushing elements (e.g., the brushing elements 103)having a plurality of holes (e.g., the plurality of element holes 220),the brushing elements including the second polymer material. Theplurality of element holes has a first element region, wherein the firstelement porosity of the first element region is greater than about 70%.The high porosity of the element holes can be achieved by improvedcontrol of material properties of the body through 3D printing.

The plurality of element holes has a second element region, and a secondelement porosity of the second element region is greater than the firstelement porosity, according to one embodiment. The first polymermaterial has a third element region, a third element porosity of thethird element region is greater than the first element porosity, and thethird element porosity is less than the second element porosity,according to one embodiment. The first element porosity is greater thanthe first body porosity, according to one embodiment.

Operation 504 includes exposing the dispensed droplets to UV light,according to one embodiment. Operations 503 and 504 are performedsimultaneously, according to one embodiment. Operations 501 and 503 areperformed simultaneously, according to one embodiment. Operations 502and 504 are performed simultaneously, according to one embodiment.

In some embodiments, the method 500 further includes sequentialrepetitions of operations 501 and 502 and/or operations 503 and 504 toform a plurality of print layers stacked in a Z-direction, i.e., adirection orthogonal to the surface of the manufacturing support or apreviously formed print layer disposed thereon. The predetermineddroplet dispense pattern used to form each print layer may be the sameor different as a predetermined droplet dispense pattern used to form aprevious print layer disposed there below.

FIG. 6A illustrates a schematic sectional view of an additivemanufacturing system 600, according to one embodiment. The additivemanufacturing system 600 is configured to print component 622 (e.g., thebrush 102) using a three-dimensional (3D) printing process, such as aCLIP process. As shown, the additive manufacturing system 600 includes amotion system 640, a tank system 610, a treatment source 615, and acontroller 690. The motion system 640 is disposed above the tank system610. The tank system 610 is disposed above the treatment source 615. Insome embodiments, the treatment source 615 is disposed above, or to theside of, the tank system 610.

The tank system 610 is configured to hold a printing liquid 611 therein.The printing liquid 611 can include any of the chemicals identified aspre-polymer condition herein. The printing liquid can also include aphotopolymer resin. As shown, the tank system 610 includes a tank 617having a tank bottom 621 and a membrane 612. The tank bottom 621includes a portion 620 (e.g., a window) that is permeable to treatmentemission 616 produced by the treatment source 615. The membrane 612 isconfigured such that treatment emission 616 can penetrate the portion620 of the tank bottom 621. The membrane 612 also prevents the printingliquid from making unwanted contact and/or chemically reacting with thebottom of the tank 617. The membrane 612 creates a “dead zone” orpersistent liquid interface, preventing the resin from attaching to theportion 620. For example, if the printing liquid 611 includes aphotopolymer, the membrane 612 prevents or reduces photopolymerizationbetween the printing liquid and the portion 620.

The treatment source 615 is configured to emit treatment emission 616onto the surface 611A of the printing liquid 611 disposed in the tanksystem 610. The treatment source 615 emits the treatment emission 616 ina certain pattern over time, and the patterns over time create thecomponent 622. The treatment emission 616 treats the printing liquid 611at the surface 611A such that the printing liquid becomes a solidmaterial 630. The solid material 630 forms a portion of the component622. The solid material 630 can be any of the first or second polymermaterials described above. Although only one treatment source 615 isshown in FIG. 6A, any number of treatment sources can be included. Insome embodiments, a heater (not shown) controls the temperature of theprinting liquid 611, which results in finer control of the component 622structure.

In one example, the printing liquid 611 includes a UV-curable material,the treatment source 615 is configured to emit the treatment emission616 including UV light, and thus the printing liquid at the surface 611Abecomes the solid material 630. In another example, the printing liquid611 includes a thermally-curable material, the treatment source 615 isconfigured to emit the treatment emission 616 including thermal energy,and thus the printing liquid at the surface 611A becomes the solidmaterial 630. Other wavelengths of light instead of/in addition to UVlight are contemplated, such as visible light, infrared light, x-rays,and the like. UV light and thermal energy are used in combination, insome embodiments. The treatment source 615 further includes a lenssystem including one or more lenses, and the focal length of the lenssystem is such that the treatment emission 616 is focused on the surface611A, according to one embodiment.

The printing liquid 611 includes a UV-curable material, the treatmentsource 615 is configured to emit the treatment emission 616 including UVlight, the portion 620 includes a window permeable to UV light, and themembrane 612 is configured to allow the passage of UV light, accordingto one embodiment. The membrane 612 is oxygen-permeable, according tosome embodiments.

The motion system 640 is configured to move the component 622 duringapplication of the treatment emission 616. As shown, the motion system640 includes a base 601, a support member 602, a support actuator 604,and a grasper 603. The support member 602 is coupled to the base 601.The grasper 603 is coupled to the solid material 630 of the component622. The grasper 603 includes any apparatus used in the art that cancouple to the solid material 630, such as a build plate or buildplatform. The support actuator 604 is configured to raise the supportmember 602, which in turn raises the grasper, during manufacture of thecomponent 622. The pull-rate, or speed, of the support member 602 isabout equal to the emission rate of the treatment source 615 and/or thecuring rate of the printing liquid 611, according to one embodiment.

The controller 690 is configured to control the various components ofthe additive manufacturing system 600. As shown, the system controller690 includes a programmable central processing unit (CPU) 691 which isoperable with a memory 692 (e.g., non-volatile memory) and supportcircuits 693. The support circuits 693 are conventionally coupled to theCPU 691 and include cache, clock circuits, input/output subsystems,power supplies, and the like, and combinations thereof coupled to thevarious components of the additive manufacturing system 600, tofacilitate control thereof. The CPU 691 is one of any form of generalpurpose computer processor used in an industrial setting, such as aprogrammable logic controller (PLC), for controlling various componentsand sub-processors of the additive manufacturing system 600. The memory692, coupled to the CPU 691, is non-transitory and is typically one ormore of readily available memories such as random access memory (RAM),read only memory (ROM), floppy disk drive, hard disk, or any other formof digital storage, local or remote.

Typically, the memory 692 is in the form of a computer-readable storagemedia containing instructions (e.g., non-volatile memory), which whenexecuted by the CPU 691, facilitates the operation of the manufacturingsystem 600. The instructions in the memory 692 are in the form of aprogram product such as a program that implements the methods of thepresent disclosure.

The program code may conform to any one of a number of differentprogramming languages. In one example, the disclosure may be implementedas a program product stored on computer-readable storage media for usewith a computer system. The program(s) of the program product definefunctions of the embodiments (including the methods described herein).

Illustrative computer-readable storage media include, but are notlimited to: (i) non-writable storage media (e.g., read-only memorydevices within a computer such as compact disc-read only memory (CD-ROM)disks readable by a CD-ROM drive, flash memory, ROM chips or any type ofsolid-state non-volatile semiconductor memory) on which information ispermanently stored; and (ii) writable storage media (e.g., floppy diskswithin a diskette drive or hard-disk drive or any type of solid-staterandom-access semiconductor memory) on which alterable information isstored. Such computer-readable storage media, when carryingcomputer-readable instructions that direct the functions of the methodsdescribed herein, are embodiments of the present disclosure. In someembodiments, the methods set forth herein, or portions thereof, areperformed by one or more application specific integrated circuits(ASICs), field-programmable gate arrays (FPGAs), or other types ofhardware implementations. In some other embodiments, the polishing padmanufacturing methods set forth herein are performed by a combination ofsoftware routines, ASIC(s), FPGAs and, or, other types of hardwareimplementations.

The controller 690 directs the speed and power of the support actuator604, and the intensity and patterns created by the treatment source 615.In some embodiments, the pattern are collectively stored in the memory692 as CAD-compatible digital printing instructions.

While the support member 602 is raised, the surface 611A of the printingliquid 611 flows to, and is in contact with, the solid material 630. Thenew portion of the printing liquid 611 is exposed to the treatmentemission 616, converting the printing liquid to new solid material 630.FIG. 6B illustrates a schematic sectional view of the additivemanufacturing system 600 with the support member 602 in an elevatedposition, according to one embodiment. As shown in FIG. 6B, more of thecomponent 622 is created as the support member 602 is raised. Thetreatment emission 616 produced by the treatment source 615 varies withtime, and thus the varying pattern of the treatment emission creates thefeatures of the component 622 (e.g., the brush 102). The support member602 is configured to be raised continuously, and thus the creation ofthe component 622 is continuous.

When the additive manufacturing system 600 is used, the treatmentemission 616 is focused on the printing liquid 611 in the materialregions 404, and no treatment emission is focused on the printing liquidin the hole regions 402 (FIG. 4 ). Thus, holes are eventually created inthe hole regions 402, whereas the material regions 404 remain as thesolid material 630.

FIG. 7 is a flow diagram for method 700 operations of forming a brush,according to one embodiment. Although the method 700 operations aredescribed in conjunction with FIGS. 6A, 6B, and 7 , persons skilled inthe art will understand that any system configured to perform the methodoperations, in any order, falls within the scope of the embodimentsdescribed herein. Embodiments of the method 700 may be used incombination with one or more of the systems and system operationsdescribed herein, such as the additive manufacturing system 600 of FIGS.6A and 6B and the CAD compatible print instructions 400 of FIG. 4 . Themethod 700 can be stored or accessible to the controller 690 as computerreadable media containing instructions, that when executed by aprocessor of the controller 690, cause the additive manufacturing system600 to perform the method 700. Further, embodiments of the method 700can be used to form any one or combination of embodiments of the brushes(e.g., brush 102) shown and described herein.

The method 700 includes a 3D printing process of forming a component(e.g., the brush 102). The 3D printing process can includestereolithography (SLA), powder bed printing, multi-jet printing, fuseddeposition modeling (FDM), digital light processing (DLP) printing,continuous liquid interface production (CLIP), and any combination ofthe above.

Method 700 includes forming a body of a component (e.g., brush 102)using a (3D) printing process, the body comprising a first polymermaterial comprising a plurality of body holes, the plurality of bodyholes having a first body region, wherein the a first body porosity ofthe first body region is greater than about 70%, and forming a channelin the body of the brush using a 3D printing process, the channelfluidly coupled to the body plurality of holes. In some embodiments, themethod 700 begins at operation 710, where a surface of printing liquidis exposed to treatment emission. The surface of the processing liquidis converted into solid material, which makes up a portion of thecomponent. The additive manufacturing system 600 is used, and thesurface 611A of the printing liquid 611 is exposed to the treatmentemission 616 and converted into the solid material 630, according to oneembodiment. The treatment emission 616 includes UV light, according toone embodiment.

At operation 720, a support member attached to the solid material israised while time-varying treatment emission is applied to the printingliquid. The treatment emission 616 is created by the treatment source615, according to one embodiment. The treatment emission varies withtime, and thus the varying pattern of the treatment emission creates thefeatures of the component (e.g., the brush 102). The support member israised continuously, and thus the creation of the component iscontinuous.

The method 700 can be used to create a brush 102 with regions of highporosity. The pore distribution of the brush 102 can be random whilestill having a porosity above a certain value (e.g., above about 70%porosity). Said another way, although the value of the porosity can becontrolled, the hole/pore size and/or distribution can be random. Forexample, ripples in the printing liquid can induce randomness in thedistribution and/or pore size. In another example, inherent jerking orjostling in the raising of the support member induces randomness in theporosity distribution. In yet another example, variations in thewavelength and/or temperature of the treatment emission inducesrandomness in the porosity distribution. In addition, the method 700does not require a support structure to support initial growth layers onforming the brush 102.

As described above, a brush, a method of forming a brush, and astructure embodied in a machine readable medium used in a design processare provided. The brush includes a body and a channel configured todeliver a cleaning liquid through holes in the body. The method formsthe brush using 3D printing. The structure provides details for makingthe brush.

The disclosure herein allows a method of forming a brush that does notrequire the removal of active porogen. This improves the speed and easeof manufacture of the brush. In addition, new designs can be used withthe same manufacturing process by varying the details of the structureand 3D printing method.

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosure may bedevised without departing from the basic scope thereof, and the scopethereof is determined by the claims that follow.

1. A method of forming a brush, comprising: forming a body of the brushusing a three-dimensional (3D) printing process, the body comprising afirst solid material comprising a plurality of body holes, the pluralityof body holes having a first body region, wherein a first body porosityof the first body region is greater than about 70%; and forming achannel in the body of the brush using a 3D printing process, thechannel fluidly coupled to the plurality of body holes.
 2. The method ofclaim 1, wherein the 3D printing process comprises: exposing a surfaceof a printing liquid to treatment emission, such that at least a portionof the printing liquid is converted to a solid material; and raising asupport member coupled to the solid material while a time-varyingtreatment emission is applied to the surface.
 3. The method of claim 2,wherein the plurality of body holes has a second body region, and asecond body porosity of the second body region is greater than the firstbody porosity.
 4. The method of claim 3, wherein the first solidmaterial has a third body region, a third body porosity of the thirdbody region is greater than the first body porosity, and the third bodyporosity is less than the second body porosity.
 5. The method of claim2, wherein the time-varying treatment emission comprises ultraviolet(UV) light.
 6. The method of claim 2, wherein the printing liquidcomprises a photopolymer.
 7. The method of claim 2, further comprisingforming a plurality of brushing elements disposed on the body using a 3Dprinting process, each of the brushing elements comprising the firstsolid material comprising a plurality of element holes, the plurality ofelement holes having a first element region, wherein a first elementporosity of the first element region is greater than about 70%.
 8. Themethod of claim 7, wherein the channel is fluidly coupled to theplurality of element holes.
 9. The method of claim 1, wherein the firstbody region comprises a random distribution of pores.
 10. The method ofclaim 9, wherein the random distribution of holes is at least partiallycreated by waves at the surface of the printing liquid.
 11. A method offorming a brush, comprising: forming a body of the brush using athree-dimensional (3D) printing process, and forming a plurality ofbrushing elements disposed on the body using the 3D printing process,wherein the body comprises a first solid material comprising a pluralityof body holes, the plurality of body holes having a first body region,wherein a first body porosity of the first body region varies radiallyoutward from an element centerline of each brushing element; and forminga channel in the body of the brush using a 3D printing process, thechannel fluidly coupled to the plurality of body holes.
 12. The methodof claim 11, wherein the 3D printing process comprises: exposing asurface of a printing liquid to treatment emission, such that at least aportion of the printing liquid is converted to a solid material; andraising a support member coupled to the solid material while atime-varying treatment emission is applied to the surface.
 13. Themethod of claim 11, wherein each of the brushing elements comprises thefirst solid material.
 14. The method of claim 13, wherein the brushingelements comprise a plurality of element holes having a first elementregion, wherein a first element porosity of the first element region isgreater than 70%, and the channel is fluidly coupled to the plurality ofelement holes.
 15. The method of claim 11, wherein the body is acylindrical body having an outer circumferential surface and an innercircumferential surface, wherein the inner circumferential surface formsthe channel.
 16. A method of forming a brush, comprising: forming abrush body comprising an outer surface and an inner surface using athree-dimensional (3D) printing process, the body comprising a firstpolymer material comprising a plurality of body holes, the plurality ofbody holes having a first body region and a second body region, whereina porosity of the first body region is greater than about 70%, andwherein a porosity of the second body region is greater than the firstbody porosity; and forming a channel in the brush body that is fluidlycoupled to the plurality of body holes.
 17. The method of claim 16,wherein the 3D printing process comprises: exposing a surface of aprinting liquid to treatment emission, such that at least a portion ofthe printing liquid is converted to a solid material; and raising asupport member coupled to the solid material while a time-varying UVtreatment emission is applied to the surface.
 18. The method of claim16, further comprising forming a plurality of brushing elements disposedon the body using the 3D printing process, each of the brushing elementscomprising the first solid material.
 19. The method of claim 16, whereinthe body is a cylindrical body having an outer circumferential surfaceand an inner circumferential surface, wherein the inner circumferentialsurface forms the channel.
 20. The method of claim 16, wherein the firstbody region comprises a random distribution of pores.